Synthetic Gecko Hair Fabrication by DRIE + Molding methods.
Mushroom shape micro and nano polymer structures can be produced using DRIE (Deep Reactive Ion Etch). Using Champagne Glass Effect on thin oxide layer of SOI (Silicon on Insulator) wafer with DRIE, we are able to create mushroom shape micro/nano scale fiber master template. With this template, micro/nano polymer fiber array can be fabricated by subsequent molding in a large area.
Approach: The team already developed the methods for the fabrication of mushroom shape microfibers and is currently developing and testing methods for the production of polymer nanofibers and micro/nano hierarchical fibers. Using standard DRIE technology and commonly available equipment in clean room, arrays of super uniform mushroom shape micro/nana fibers can be constructed.
Benefits: DRIE is one of the well defined microfabrication methods to generate highly uniform high aspect ratio trench. CGE (Champagne Glass Effect) of DRIE allows us to fabricate mushroom shape fiber array negative template. DRIE and CGE natively do not have any limit to fabricate the negative mold for nanoscale mushroom shape fibers.
Members: Jiho Song
Past Members: Seok Kim, Metin Sitti